Scanning probe lithography
From Wikipedia, the free encyclopedia
Scanning probe lithography describe a set of lithographic methods in which a microscopic stylus is mechanically moved across a surface to form a pattern, either by mechanically deforming a soft film on the surface designed for this purpose (nanoimprint lithography), or by transferring a chemical species to the surface (Dip Pen Nanolithography).
Scanning probe microscopy | ||
|---|---|---|
| Common microscopes | ||
| Other microscopes | Electrostatic force microscope · Electrochemical scanning tunneling microscope · Kelvin probe force microscope · Magnetic force microscope · Magnetic resonance force microscopy · Near-field scanning optical microscope · Photothermal microspectroscopy · Scanning capacitance microscopy · Scanning gate microscopy · Scanning Hall probe microscope · Scanning ion-conductance microscopy · Spin polarized scanning tunneling microscopy · Scanning voltage microscopy | |
| Applications | Scanning probe lithography · Dip-Pen Nanolithography · Feature-oriented scanning · IBM Millipede | |
| See also | ||
Nanolithography | ||
|---|---|---|
| Techniques | Soft lithography · Nanoimprint lithography · Scanning probe lithography · Electron beam lithography · Extreme UV lithography · X-ray lithography | Image:Xrl currents3.gif |
| See also | Nanotechnology · Photolithography · Nanoelectronics | |
